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Atwater, Harry
Patent from
CaltechAUTHORS
Flagan, Richard C. and Atwater, Harry A., et el. (2004)
Aerosol process for fabricating discontinuous floating gate microelectronic devices
Flagan, Richard C. and Boer, Elizabeth A., et el. (2003)
Aerosol silicon nanoparticles for use in semiconductor device fabrication