Atwater, Harry

Patent from CaltechAUTHORS

• Flagan, Richard C. and Atwater, Harry A., et el. (2004) Aerosol process for fabricating discontinuous floating gate microelectronic devices
• Flagan, Richard C. and Boer, Elizabeth A., et el. (2003) Aerosol silicon nanoparticles for use in semiconductor device fabrication