@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20111026-074002939,
    title = "DTIP 2003: Design, test, integration and packaging of MEMS/MOEMS",
    chapter = "Yield strength of thin-film parylene-C",
    year = "2003",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20111026-074002939",
    id = "record",
    isbn = "0-7803-7066-X",
    doi = "10.1109/DTIP.2003.1287075"
}