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Bergman, Kostia
Contributor from
CaltechAUTHORS_contributor
Shih, Victor Chi-Yuan and Harder, Theodore A., et el. (2003)
Yield strength of thin-film parylene-C
; ISBN 0-7803-7066-X; DTIP 2003: Design, test, integration and packaging of MEMS/MOEMS; 394-398;
10.1109/DTIP.2003.1287075