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Chasiotis, Ioannis
Book Chapter from
CaltechAUTHORS
Chasiotis, Ioannis and Knauss, Wolfgang G. (2000)
Microtensile tests with the aid of probe microscopy for the study of MEMS materials
; ISBN 9780819438317; Materials and Device Characterization in Micromachining III; 96-103;
10.1117/12.395616
Chasiotis, Ioannis and Knauss, Wolfgang G. (1998)
Mechanical properties of thin polysilicon films by means of probe microscopy
; ISBN 9780819429711; Materials and Device Characterization in Micromachining; 66-75;
10.1117/12.324072
