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Chen, Jen-Sue
Combined from
CaltechAUTHORS
Kolawa, Elizabeth A. and Reid, J. S., et el. (1993)
Amorphous metallic alloys: a new advance in thin-film diffusion barriers for copper metallization
; ISBN 9780819410030; Submicrometer Metallization: Challenges, Opportunities, and Limitations; 11-17;
10.1117/12.145460