@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20170525-153739826,
    title = "2nd International Symposium on Plasma Process-Induced Damage",
    chapter = "On the Link Between Electron Shadowing And Charging Damage",
    year = "1997",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20170525-153739826",
    id = "record",
    isbn = "0-9651-5771-7",
    doi = "10.1109/PPID.1997.596692"
}