@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20190409-143106813, title = "Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)", chapter = "An integrated MEMS system for turbulent boundary layer control", year = "1997", url = "https://resolver.caltech.edu/CaltechAUTHORS:20190409-143106813", id = "record", isbn = "0780338294", doi = "10.1109/sensor.1997.613647" } @inbook{https://resolver.caltech.edu/CaltechAUTHORS:20180725-160850964, title = "Miniaturized Systems with Micro-Optics and Micromechanics", chapter = "Magnetically actuated MEMS scanning mirror", year = "1996", url = "https://resolver.caltech.edu/CaltechAUTHORS:20180725-160850964", id = "record", isbn = "0819420611", doi = "10.1117/12.234635" }