@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20150731-110120088,
    title = "TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference",
    chapter = "Diamagnetically Levitated MEMS Accelerometers",
    year = "2007",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20150731-110120088",
    id = "record",
    isbn = "1-4244-0842-3",
    doi = "10.1109/SENSOR.2007.4300352"
}


@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20150731-110953413,
    title = "2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics",
    chapter = "Characterization of an Improved, Real-Time MEMS-Based Phase-Shifting Interferometer",
    year = "2007",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20150731-110953413",
    id = "record",
    isbn = "978-1-4244-0641-8",
    doi = "10.1109/OMEMS.2007.4373838"
}


@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20150730-164608152,
    title = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005",
    chapter = "A simple process to fabricate self-aligned, high-performance torsional microscanners; demonstrated use in a two-dimensional scanner",
    year = "2005",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20150730-164608152",
    id = "record",
    isbn = "0-7803-9278-7",
    doi = "10.1109/OMEMS.2005.1540056"
}


@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20150915-164937836,
    title = "Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, South Carolina, June 6-10, 2004 : technical digest",
    chapter = "Addressable Microlens Array to Improve Dynamic Range of Shack-Hartmann Sensors",
    year = "2004",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20150915-164937836",
    id = "record",
    isbn = "0964002450"
}


@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20150730-163529431,
    title = "2003 IEEE/LEOS International Conference on Optical MEMS",
    chapter = "Micromachined Polarization Beam Splitters for the Visible Spectrum",
    year = "2003",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20150730-163529431",
    id = "record",
    isbn = "0-7803-7830-X",
    doi = "10.1109/OMEMS.2003.1233520"
}


@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20150730-144046651,
    title = "12th International Conference on TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems 2003",
    chapter = "Microfabricated torsional actuator using self-aligned plastic deformation",
    year = "2003",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20150730-144046651",
    id = "record",
    isbn = "0-7803-7731-1",
    doi = "10.1109/SENSOR.2003.1216940"
}


@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20150730-161445697,
    title = "2003 IEEE/LEOS International Conference on Optical MEMS",
    chapter = "Optical properties of microlenses fabricated using hydrophobic effects and polymer-jet-printing technology",
    year = "2003",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20150730-161445697",
    id = "record",
    isbn = "0-7803-7830-X",
    doi = "10.1109/OMEMS.2003.1233519"
}


@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20120509-154113327,
    chapter = "Measurement of Young's modulus on microfabricated structures using a surface profiler",
    year = "1990",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120509-154113327",
    id = "record",
    doi = "10.1109/MEMSYS.1990.110267"
}


@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20120517-094304531,
    chapter = "IC-processed micro-motors: design, technology, and testing",
    year = "1989",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120517-094304531",
    id = "record",
    doi = "10.1109/MEMSYS.1989.77950"
}


@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20190429-151824840,
    chapter = "IC-processed electrostatic micro-motors",
    year = "1988",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20190429-151824840",
    id = "record",
    doi = "10.1109/iedm.1988.32901"
}


@inbook{https://resolver.caltech.edu/CaltechAUTHORS:20120607-142008892,
    chapter = "Fracture strain of LPCVD polysilicon",
    year = "1988",
    url = "https://resolver.caltech.edu/CaltechAUTHORS:20120607-142008892",
    id = "record",
    doi = "10.1109/SOLSEN.1988.26440"
}