Muller, Richard Stephen

Combined from CaltechAUTHORS

• Garmire, David and Choo, Hyuck, et el. (2011) Integrated MEMS metrology device using complementary measuring combs
• Choo, Hyuck and Muller, Richard S. (2010) Optical switch using frequency-based addressing in a microelectromechanical systems array
• Choo, Hyuck and Garmire, David, et el. (2009) Method for fabricating vertically-offset interdigitated comb actuator device
• Choo, Hyuck and Muller, Richard S., et el. (2009) MEMS-based, phase-shifting interferometer
• Choo, Hyuck and Muller, Richard S. (2008) Optical system applicable to improving the dynamic range of Shack-Hartmann sensors
• Choo, Hyuck and Muller, Richard S. (2007) Devices, Structures, and Processes for Optical MEMS; IEEJ Transactions on Electrical and Electronic Engineering; Vol. 2; No. 3; 216-231; 10.1002/tee.20156
• Choo, Hyuck and Garmire, David, et el. (2007) Simple Fabrication Process for Self-Aligned, High-Performance Microscanners—Demonstrated Use to Generate a 2-D Ablation Pattern; Journal of Microelectromechanical Systems; Vol. 16; No. 2; 260-268; 10.1109/JMEMS.2007.895048
• Kant, R. and Garmire, D., et el. (2007) Characterization of an Improved, Real-Time MEMS-Based Phase-Shifting Interferometer; ISBN 978-1-4244-0641-8; 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics; 57-58; 10.1109/OMEMS.2007.4373838
• Garmire, D. and Choo, H., et el. (2007) Diamagnetically Levitated MEMS Accelerometers; ISBN 1-4244-0842-3; TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference; 1203-1206; 10.1109/SENSOR.2007.4300352
• Choo, Hyuck and Muller, Richard S. (2006) Addressable Microlens Array to Improve Dynamic Range of Shack–Hartmann Sensors; Journal of Microelectromechanical Systems; Vol. 15; No. 6; 1555-1567; 10.1109/JMEMS.2006.886011
• Kim, Jongbaeg and Choo, Hyuck, et el. (2006) Microfabricated Torsional Actuators Using Self-Aligned Plastic Deformation of Silicon; Journal of Microelectromechanical Systems; Vol. 15; No. 3; 553-562; 10.1109/JMEMS.2006.876789
• Choo, H. and Garmire, D., et el. (2005) A simple process to fabricate self-aligned, high-performance torsional microscanners; demonstrated use in a two-dimensional scanner; ISBN 0-7803-9278-7; IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005; 21-22; 10.1109/OMEMS.2005.1540056
• Choo, Hyuck and Muller, Richard S. (2004) Addressable Microlens Array to Improve Dynamic Range of Shack-Hartmann Sensors; ISBN 0964002450; Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, South Carolina, June 6-10, 2004 : technical digest
• Gupta, Kishnan and Choo, Hyuck, et el. (2003) Micromachined Polarization Beam Splitters for the Visible Spectrum; ISBN 0-7803-7830-X; 2003 IEEE/LEOS International Conference on Optical MEMS; 171-172; 10.1109/OMEMS.2003.1233520
• Kim, Jongbaeg and Choo, Hyuck, et el. (2003) Microfabricated torsional actuator using self-aligned plastic deformation; ISBN 0-7803-7731-1; 12th International Conference on TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems 2003; 1015-1018; 10.1109/SENSOR.2003.1216940
• Choo, Hyuck and Muller, Richard S. (2003) Optical properties of microlenses fabricated using hydrophobic effects and polymer-jet-printing technology; ISBN 0-7803-7830-X; 2003 IEEE/LEOS International Conference on Optical MEMS; 169-170; 10.1109/OMEMS.2003.1233519
• Tai, Yu-Chong and Muller, Richard S. (1990) Measurement of Young's modulus on microfabricated structures using a surface profiler; 10.1109/MEMSYS.1990.110267
• Tai, Yu-Chong and Fan, Long-Sheng, et el. (1989) IC-processed micro-motors: design, technology, and testing; 10.1109/MEMSYS.1989.77950
• Fan, Long-Sheng and Tai, Yu-Chong, et el. (1988) IC-processed electrostatic micro-motors; 10.1109/iedm.1988.32901
• Fan, Long-Sheng and Tai, Yu-Chong, et el. (1988) Integrated movable micromechanical structures for sensors and actuators; IEEE Transactions on Electron Devices; Vol. 35; No. 6; 724-730; 10.1109/16.2523
• Tai, Y. C. and Muller, R. S. (1988) Fracture strain of LPCVD polysilicon; 10.1109/SOLSEN.1988.26440