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doi = "10.1557/PROC-201-375" } @inbook{https://resolver.caltech.edu/CaltechAUTHORS:20141024-132532019, title = "Atomic Scale Calculations of Structure in Materials", chapter = "Molecular Dynamics Simulations of Cluster Impacts on Metallic Targets", year = "1990", url = "https://resolver.caltech.edu/CaltechAUTHORS:20141024-132532019", id = "record", isbn = "9781558990821", doi = "10.1557/PROC-193-319" } @inbook{https://resolver.caltech.edu/CaltechAUTHORS:20141031-102240661, title = "Advances in materials, processing, and devices in III-V compound semiconductors", chapter = "Fabrication of GaAs/AlGaAs Quantum Well Lasers with MeV Oxygen Ion Implantation", year = "1989", url = "https://resolver.caltech.edu/CaltechAUTHORS:20141031-102240661", id = "record", isbn = "1-55899-017-8", doi = "10.1557/PROC-144-367" } @inbook{https://resolver.caltech.edu/CaltechAUTHORS:20150211-120450224, title = "Silicon-on-Insulator and Buried Metals in Semiconductors", chapter = "Formation of Buried Oxide in 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