@other{https://resolver.caltech.edu/CaltechETD:etd-02262008-140740, title = "Micromachined silicone rubber membrane valves for fluidic applications", year = "1999", url = "https://resolver.caltech.edu/CaltechETD:etd-02262008-140740", id = "record", doi = "10.7907/k8hw-ph10" }