@other{https://resolver.caltech.edu/CaltechETD:etd-07202004-135306,
    title = "Parylene for MEMS Applications",
    year = "2002",
    url = "https://resolver.caltech.edu/CaltechETD:etd-07202004-135306",
    id = "record",
    doi = "10.7907/caxb-sr18"
}